Process-chamber flow control system

专利名称：Process-chamber flow control system发明人：David W. Palmer申请号：US08/408530申请日：19950322公开号：US05634490A公开日：19970603

摘要：To control the flow of air into and/or out of a process chamber, such as a cleanroom, a two-stage system is disposed in conduits leading into and/or out of the process-chamber. One stage includes a regulator, having a plenum (7) disposed between theenvironment the vacuum source. The regulator maintains in the plenum a pressure that isbetween the pressures of the environment and the source and that is a constant amountdifferent from the environment's pressure. The regulator includes a piston (5) having afrontal face (52) exposed to air in the plenum flowing between the environment and thevacuum source, and a distal face (51) exposed to the environment's pressure. The pistonis mounted so as to variably impede the flow of air through the regulator and so that theweight of the piston tends to move the piston in a direction so as to lessen the piston'simpedance on the air flow. The other stage includes an adjustable valve (21), locatedbetween the regulator and the environment, for further impeding the flow of air.

申请人：PALMER; DAVID W.

代理机构：Bromberg & Sunstein LLP

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